320x240 microblometer uncooled IRFPA

Eric Mottin; Jean-Luc Martin; Jean-Louis Ouvrier-Buffet; Michel Vilain; Jean-Jacques Yon; Jean-Pierre Chatard

doi:10.1117/12.391765

17 July 2000 320x240 microblometer uncooled IRFPA

Eric Mottin, Jean-Luc Martin, Jean-Louis Ouvrier-Buffet, Michel Vilain, Jean-Jacques Yon, Jean-Pierre Chatard

Proceedings Volume 4028, Infrared Detectors and Focal Plane Arrays VI; (2000) https://doi.org/10.1117/12.391765
Event: AeroSense 2000, 2000, Orlando, FL, United States

Abstract

LETI LIR has been involved in Amorphous Silicon uncooled microbolometer development for a few years. This silicon IR detection is now well mastered and matured so that industrial transfer LETI/LIR technology is performed towards Sofradir. Industrial production of 320 X 240 mirobolometer array with 45 micrometer pitch started. After a short description of the technology and the readout circuit architecture we focus on device reliability which is the key point for microbolometer application. Methodology for reliability enhancement is described. First results obtained on amorphous silicon reliability are presented. Electro-optical results obtained from an IRCMOS 320 X 240 with 45 micrometer pitch are presented. NEDT close to 70 mK can be obtained with our standard microbolometer amorphous silicon technology.

Citation Download Citation

Eric Mottin, Jean-Luc Martin, Jean-Louis Ouvrier-Buffet, Michel Vilain, Jean-Jacques Yon, and Jean-Pierre Chatard "320x240 microblometer uncooled IRFPA", Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); https://doi.org/10.1117/12.391765

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available