(Mn, Sb)-doped PZT thin films with (La, Sr)CoO3 electrodes for uncooled infrared detectors

Yuqing Xu; Yanqi Wang; Naijuan Wu; Alex Ignatiev; Xuemin Chen

doi:10.1117/12.391719

17 July 2000 (Mn, Sb)-doped PZT thin films with (La, Sr)CoO3 electrodes for uncooled infrared detectors

Yuqing Xu, Yanqi Wang, Naijuan Wu, Alex Ignatiev, Xuemin Chen

Proceedings Volume 4028, Infrared Detectors and Focal Plane Arrays VI; (2000) https://doi.org/10.1117/12.391719
Event: AeroSense 2000, 2000, Orlando, FL, United States

Abstract

(Mn, Sb) doped-PZT (PMSZT) thin films have been grown on La_0.5Sr_0.5CoO_3-(delta )/Si and La_0.5Sr_0.5CoO_{3- (delta} )/LaAlO₃ substrates for pyroelectric detector arrays. The La_0.5Sr_0.5CoO_3(delta ) thin films, acting as a bottom electrode and as an atomic template for epitaxial growth of PMSZT, were deposited below 550 degrees Celsius thus allowing for integration with silicon technology. The epitaxial PMSZT thin films was designed to achieve high infrared responsivity using (100) oriented LSCO electrodes. The Ni-Cr/PMSZT/LSCO/Si capacitor-like structures show good ferroelectric properties with a large remnant polarization P_r of 40 (mu) C/cm², a spontaneous polarization P_s of 74 (mu) C/cm², and a coercive field E_c of 115 kV/cm under an electric field of 650 kV/cm. The PMSZT films have an electrical field breakdown strength in excess of 467 kV/cm, which is much higher than the coercive field. Voltage responsivity R_v of 4062 V/W at 2 Hz and current responsivity R_i of 281 (mu) A/W at 25 Hz was achieved under black body illumination. With CO₂ laser illumination at a wavelength equals 10.6 micrometer, an R_v of 4140 V/W at 2 Hz and an R_i of 441 (mu) A/W at 25 Hz was achieved.

Citation Download Citation

Yuqing Xu, Yanqi Wang, Naijuan Wu, Alex Ignatiev, and Xuemin Chen "(Mn, Sb)-doped PZT thin films with (La, Sr)CoO3 electrodes for uncooled infrared detectors", Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); https://doi.org/10.1117/12.391719

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available