Paper
21 November 2001 State of commercialization of MEMS: present and future prospects
Author Affiliations +
Proceedings Volume 4591, Electronics and Structures for MEMS II; (2001) https://doi.org/10.1117/12.449172
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia
Abstract
MEMS/MST technology was introduced over twenty years ago embellished by visions and promises of new products and applications that would revolutionize our lives. As a result we witnessed the creation of many new companies whose goal was to commercialize the technology. However, a few years later commercialization of the technology turned out to be an agonizingly process, a reaction attributed to the overestimation of the speed of technology transfer. This was further complicated by the fact that MEMS, while an enabling technology, is also a disruptive technology destined to completely replace existing, well proven familiar solutions. The adoption of new technology often requires marked evidence of superiority before displacing an established technology. As a rule of thumb, one needs to see a fivefold advantage in some parameters of importance, such as performance and cost, before there is any likelihood of adoption. Several MEMS devices have emerged that evolved into a significant commercial realization. Several others appear to be on the threshold of commercial success. The characteristics of some of these MEMS devices will be examined along with the major players and a number of issues related to overcoming the roadblocks of commercialization. We will also offer some predictions for the future of this technology.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alex Hariz "State of commercialization of MEMS: present and future prospects", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); https://doi.org/10.1117/12.449172
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KEYWORDS
Microelectromechanical systems

Sensors

Computer aided design

Silicon

Packaging

Switches

Semiconductors

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