Bonding technologies for silicon scanning mirror having vertical comb fingers

Jin-Ho Lee; Young-Chul Ko; Byoung-So Choi; Jong-Min Kim; Duk-Young Jeon

doi:10.1117/12.448998

21 November 2001 Bonding technologies for silicon scanning mirror having vertical comb fingers

Jin-Ho Lee, Young-Chul Ko, Byoung-So Choi, Jong-Min Kim, Duk-Young Jeon

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448998
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

A 1500 micrometers X 1200 micrometers silicon scanning mirror for laser display has been fabricated. This scanning mirror is mainly composed of two structures having vertical comb fingers. By anodic bonding of the silicon wafer and the Pyrex glass substrate, and followed deep ICPRIE (Inductively Coupled Plasma Reactive Ion Etching), isolated comb electrodes were fabricated at the lower structure. But in this anodic bonding, gold signal lines for electrical connection to the electrodes, which were inserted between silicon and Pyrex glass, were cut off by mechanical pressure or damaged to agglomerate by diffusion. To remove these phenomena, Pyrex glass was trenched about 2000 Angstroms in depth in the shape of signal lines, and Cr/Au signal lines were formed along the etched grooves about 500 Angstroms/3500 Angstroms in depth, and then annealed at 400 degree(s)C, N₂ atmosphere, for 1 hour before anodic bonding. As a result, gold signal lines were successfully fabricated and the contact resistance was acquired below several tens ohms. By flip chip bonding, the upper and lower structure having vertical comb fingers were assembled. Vertical comb fingers of two structures were aligned with a microscope and the frames of two structures were bonded at 300 degree(s)C for 20 sec. using the eutectic bonding material, electroplated AuSn. Using these bonding technologies, the scanning mirror was successfully fabricated and it could be used for laser display as a galvanometric vertical scanner.

Citation Download Citation

Jin-Ho Lee, Young-Chul Ko, Byoung-So Choi, Jong-Min Kim, and Duk-Young Jeon "Bonding technologies for silicon scanning mirror having vertical comb fingers", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448998

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