MEMS technology and explosive growth fiber optical communication

Ai Qun Liu

doi:10.1117/12.446592

29 October 2001 MEMS technology and explosive growth fiber optical communication

Ai Qun Liu

Proceedings Volume 4595, Photonic Systems and Applications; (2001) https://doi.org/10.1117/12.446592
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore

Abstract

Silicon micromachines are an emerging technology that will impact almost every area of science and technology. From industries as diverse as automotive, cellular, aerospace, chemical as well as lightwave systems, N/MEMS (Nano/Microelectromechanical Systems) is rapidly becoming the solution of choice for many technical problems. MEMS devices are, in general, built using standard IC techniques. Starting with a silicon wafer and depositing a series of films such as nitrides, polysilicon, oxides and metals, one builds a complex three-dimensional structure in much the same way one builds an IC. However, unlike an IC, one then releases the device by etching away the oxides, producing a structure that can move. This subtle change in processing allows one to produce devices that move including rotary gears, hinges, plates, flexural beams and motors of every imaginable type. In optical fiber communication, MEMS allows one to build a wide range of components including data modulators, variable attenuators, optical switches, active equalizers, add/drop multiplexers, optical crossconnects (OXCs), dispersion compensators, all- optical switches, tunable laser sources, active packages and adaptive optical elements. In this paper, the design and fabrication of MEMS optical devices using readily available standard fabrication facilities for different fiber optical communication applications will be discussed in details.

Citation Download Citation

Ai Qun Liu "MEMS technology and explosive growth fiber optical communication", Proc. SPIE 4595, Photonic Systems and Applications, (29 October 2001); https://doi.org/10.1117/12.446592

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Micromirrors

Tunable lasers

Semiconductor lasers

Microelectromechanical systems

Optical switching

Fiber optic communications

Mirrors

Show All Keywords

Keywords/Phrases

Search In:

Publication Years