Design, simulation, and testing of IDT-based MEMS gyroscope

William D Suh; K. A. Jose; Pascal B Xavier; Vijay K. Varadan; Vasundara V. Varadan

doi:10.1117/12.436589

16 August 2001 Design, simulation, and testing of IDT-based MEMS gyroscope

William D Suh, K. A. Jose, Pascal B Xavier, Vijay K. Varadan, Vasundara V. Varadan

Proceedings Volume 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS; (2001) https://doi.org/10.1117/12.436589
Event: SPIE's 8th Annual International Symposium on Smart Structures and Materials, 2001, Newport Beach, CA, United States

Abstract

The design and simulation of a Surface Acoustic Wave (SAW) MEMS gyroscope using HP EESOF is presented in this paper. This SAW gyroscope is an integration of a SAW resonator and a SAW sensor. The SAW resonator is designed and optimized using coupling-of-modes theory. The SAW resonator is used to setup the stable reference vibration. A SAW sensor arranged in orthogonal to the resonator. Further to this resonator, strategically positioned metallic dots that form an array along the standing wave anti-node locations are subjected to the reference vibratory motion. These vibrating dot arrays through the Coriolis effect will generate secondary SAW in orthogonal direction under rotation, which can then be picked up by the SAW sensor. Numerical simulation using HP EESOF is used to optimize this gyroscope. This SAW gyroscope can be competitively priced, inherently rugged, reliable and very sensitive, which is capable of being wirelessly interrogated, without any sensor power source. In view of its one-layer planar configuration, this gyroscope can be implemented easily for applications requiring conformal mounting onto a surface of interest.

Citation Download Citation

William D Suh, K. A. Jose, Pascal B Xavier, Vijay K. Varadan, and Vasundara V. Varadan "Design, simulation, and testing of IDT-based MEMS gyroscope", Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); https://doi.org/10.1117/12.436589

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