CD control analysis of the SCALPEL-HT/alpha optics

Stuart T. Stanton; Warren K. Waskiewicz; Eric Munro; John A. Rouse; Xieqing Zhu

doi:10.1117/12.436643

20 August 2001 CD control analysis of the SCALPEL-HT/alpha optics

Stuart T. Stanton, Warren K. Waskiewicz, Eric Munro, John A. Rouse, Xieqing Zhu

Proceedings Volume 4343, Emerging Lithographic Technologies V; (2001) https://doi.org/10.1117/12.436643
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

SCALPEL Differs from optical lithography in its use of high- energy electron imaging, electron-scattering contrast, a segmented mask, and a sub-field stitching architecture. Imaging performance of a high-throughput SCALPEL tool is primarily determined by geometric and space-charge aberrations, which both have unique dependencies on key optics parameters. A complete understanding of the imaging point-spread function (PSF) is vital to the optimization of a high throughput SCALPEL optical subsystem and the optimum use of mask pattern data bias for proximity effect correction (PEC). Previous image modeling with an assumed Gaussian PSF model was updated to use the PSF result of Monte-Carlo analysis of electron landing distributions. We find substantially different behaviors as a result of this more rigorous analysis. A proper evaluation of the true nature of the SCALPEL electron optics PSF and its dependencies in a scanning exposure mode allows for meaningful optimization and performance prediction in the area of critical dimension (CD) control.

Citation Download Citation

Stuart T. Stanton, Warren K. Waskiewicz, Eric Munro, John A. Rouse, and Xieqing Zhu "CD control analysis of the SCALPEL-HT/alpha optics", Proc. SPIE 4343, Emerging Lithographic Technologies V, (20 August 2001); https://doi.org/10.1117/12.436643

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available