Computer simulation of optical coating deposition monitored by transmission turning point

Xiaohui Zhang; Weiming Zhu; Xiaoping Li; Qingming Chen

doi:10.1117/12.361097

8 September 1999 Computer simulation of optical coating deposition monitored by transmission turning point

Xiaohui Zhang, Weiming Zhu, Xiaoping Li, Qingming Chen

Proceedings Volume 3862, 1999 International Conference on Industrial Lasers; (1999) https://doi.org/10.1117/12.361097
Event: International Symposium on Industrial Lasers, 1999, Wuhan, China

Abstract

The relations between the precision of the transmittance turning point monitoring system and the thickness error of the monitored thin film layer are analyzed in this paper. The functions are derived under different conditions. This paper has developed a program to simulate the structures of deposited coatings and the real-time variation of the transmittance through the thin film stake and substrate assembly in deposition process that take the transmission turning point monitoring approach. The simulated value of the thickness of each layer after deposition is composed of the thickness correspond to the transmittance extreme found by 1D search algorithm and random thickness error calculated by the relations mentioned above. The computer simulation accord with the experiment results.

Citation Download Citation

Xiaohui Zhang, Weiming Zhu, Xiaoping Li, and Qingming Chen "Computer simulation of optical coating deposition monitored by transmission turning point", Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); https://doi.org/10.1117/12.361097

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available