Low-dielectric-constant FLARE 2.0 films as bottom antireflective coating layers for ArF lithography

Hsuen-Li Chen; Hsu-Chun Cheng; Mei-Yi Li; Fu-Hsiang Ko; Tiao-Yuan Huang; Tien-Chi Chu

doi:10.1117/12.435637

14 September 2001 Low-dielectric-constant FLARE 2.0 films as bottom antireflective coating layers for ArF lithography

Hsuen-Li Chen, Hsu-Chun Cheng, Mei-Yi Li, Fu-Hsiang Ko, Tiao-Yuan Huang, Tien-Chi Chu

Proceedings Volume 4346, Optical Microlithography XIV; (2001) https://doi.org/10.1117/12.435637
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

We demonstrate a new bottom antireflective coating (BARC) layer for ArF lithography. The antireflective layers are composed of a low dielectric constant FLARE 2.0 film and its etching hard mask layer, such as oxide or nitride. By adding an optimized thin oxide or nitride layer, the reflectance of less than 1% at resist/silicon substrate interface can be achieved. The swing effect in the resist is also shown significantly reduced. It also has a great potential to be used as BARC layer on other highly reflectance substrate such as copper, aluminum, tungsten, titanium nitride, and tantalum nitride, which are commonly used in metal interconnect. Since it is easy to reduce reflectance by adding a FLARE film and its etching hard mask layer without adding an extra BARC layer. It is convenient to use this structure for patterning low dielectric materials in ArF lithography. Suitable etching characteristics and thermal stability of FLARE 2.0 based BARC layers are also shown in this paper.

Citation Download Citation

Hsuen-Li Chen, Hsu-Chun Cheng, Mei-Yi Li, Fu-Hsiang Ko, Tiao-Yuan Huang, and Tien-Chi Chu "Low-dielectric-constant FLARE 2.0 films as bottom antireflective coating layers for ArF lithography", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); https://doi.org/10.1117/12.435637

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available