Comparison of linewidth measurements on COG masks

Harald Bosse; Werner Mirande; Carl G. Frase; Hans-Juergen Brueck; Sigrid Lehnigk

doi:10.1117/12.425082

9 April 2001 Comparison of linewidth measurements on COG masks

Harald Bosse, Werner Mirande, Carl G. Frase, Hans-Juergen Brueck, Sigrid Lehnigk

Proceedings Volume 4349, 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2001) https://doi.org/10.1117/12.425082
Event: 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 2000, Munich, Germany

Abstract

We report on comparison measurements for linewidths of test structures on chrome on glass photomasks by means of different types of light optical transmission microscopy and low voltage scanning electron microscopy (LVSEM). The investigated linewidth or critical dimension range was chosen to be between 0.3 micrometers and 5 micrometers on isolated and dense as well as clear and opaque line structures. After offset correction of the commercial i-line CD metrology tool we observed overall agreement between the results from light optical microscopy and the results from the LVSEM in the range of 20 nm. No significant polarization dependencies of transmitted light results were observed. The edge detection algorithms used for extraction of edge position from the measured profiles will be discussed for the types of instruments involved.

Citation Download Citation

Harald Bosse, Werner Mirande, Carl G. Frase, Hans-Juergen Brueck, and Sigrid Lehnigk "Comparison of linewidth measurements on COG masks", Proc. SPIE 4349, 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (9 April 2001); https://doi.org/10.1117/12.425082

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available