Comparison study of mask error effects for various mask-making processes

Tae-Seung Eom; Ikboum Hur; Youngmo Koo; Ki-Ho Baik; Il-Hyun Choi; Do Yun Kim; Chul Shin

doi:10.1117/12.373369

30 December 1999 Comparison study of mask error effects for various mask-making processes

Tae-Seung Eom, Ikboum Hur, Youngmo Koo, Ki-Ho Baik, Il-Hyun Choi, Do Yun Kim, Chul Shin

Proceedings Volume 3873, 19th Annual Symposium on Photomask Technology; (1999) https://doi.org/10.1117/12.373369
Event: Photomask Technology and Management, 1999, Monterey, CA, United States

Abstract

Photomask is one of the most critical technologies for lithography. Optical lithography at resolution limit is a non- linear pattern transfer process. OPC (Optical Proximity Correction) technology has been used in the semiconductor industry for controlling the shape of pattern, and eliminating the line shortening and corner rounding effects for submicron feature. Therefore, OPC technology is an approach for improving lithography performance that has been received much attention recently. We investigated the lithographic performance in terms of EL (Exposure Latitude), DOF (Depth of Focus), and mask error effects for various mask fabrication. It was observed that mask error gave severe influence on the lithographic performance and the OPC simulation error also strongly depended upon the mask quality.

Citation Download Citation

Tae-Seung Eom, Ikboum Hur, Youngmo Koo, Ki-Ho Baik, Il-Hyun Choi, Do Yun Kim, and Chul Shin "Comparison study of mask error effects for various mask-making processes", Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); https://doi.org/10.1117/12.373369

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available