Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Analysis of noise and fluctuations in micromachined devices

[+] Author Affiliations
Andreas Greiner, Jan G. Korvink

Albert-Ludwig-Univ. Freiburg (Germany)

Proc. SPIE 3876, Micromachined Devices and Components V, 104 (August 31, 1999); doi:10.1117/12.360485
Text Size: A A A
From Conference Volume 3876

  • Micromachined Devices and Components V
  • Patrick J. French; Eric Peeters
  • Santa Clara, CA | September 20, 1999

abstract

We investigate noise and fluctuations in Micro-Electro- Mechanical-Systems (MEMS). MEMS operate on many different subsystem levels and in different energy domains. In the following we analyze two subsystems in more detail: (1) the electronic subsystem represented by the circuitry part of the device, (2) the mechanical subsystem consisting of fragile vibrating mechanical structures. Mode amplitudes of vibrating structures are subject to interaction with their environment, i.e. gaseous, liquid, and electronic systems, each of which shows fluctuations and noisy behavior by itself. Our approach focuses on finding the time-scales and the dominant process in order to determine the noise behavior. By applying the fluctuation-dissipation theorem we are able to extract various response coefficients, such as e.g. the carrier electric and thermal conductivity and the quality factors of the vibrational modes. The impact of response coefficients due to the cross correlations of subsystems may be analyzed. The analysis is performed by numerical simulations of an appropriate model for the different sub-systems in terms of stochastic differential equations of motion for the respective observable quantities. These are the vibrational amplitudes, the electronic densities and the currents. The resulting correlation functions are analyzed.

© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Andreas Greiner and Jan G. Korvink
"Analysis of noise and fluctuations in micromachined devices", Proc. SPIE 3876, Micromachined Devices and Components V, 104 (August 31, 1999); doi:10.1117/12.360485; http://dx.doi.org/10.1117/12.360485


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.