Microelectromechanical high-density energy storage/rapid release system

M. Steven Rodgers; James J. Allen; Kent D. Meeks; Brian D. Jensen; Samuel L. Miller

doi:10.1117/12.360496

31 August 1999 Microelectromechanical high-density energy storage/rapid release system

M. Steven Rodgers, James J. Allen, Kent D. Meeks, Brian D. Jensen, Samuel L. Miller

Proceedings Volume 3876, Micromachined Devices and Components V; (1999) https://doi.org/10.1117/12.360496
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

One highly desirable characteristic of electrostatically driven microelectromechanical systems (MEMS) is that they consume very little power. The corresponding drawback is that the force they produce may be inadequate for many applications. It has previously been demonstrated that gear reduction units or microtransmissions can substantially increase the torque generated by microengines. Operating speed, however, is also reduced by the transmission gear ratio. Some applications require both high speed and high force. If this output is only required for a limited period of time, then energy could be stored in a mechanical system and rapidly released upon demand. We have designed, fabricated, and demonstrated a high-density energy storage/rapid release system that accomplishes this task. Built using a 5-level surface micromachining technology, the assembly closely resembles a medieval crossbow. Energy releases on the order of tens of nanojoules have already been demonstrated, and significantly higher energy systems are under development.

Citation Download Citation

M. Steven Rodgers, James J. Allen, Kent D. Meeks, Brian D. Jensen, and Samuel L. Miller "Microelectromechanical high-density energy storage/rapid release system", Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); https://doi.org/10.1117/12.360496

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