Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope

[+] Author Affiliations
Ulrich Hofmann, Sascha Muehlmann, Martin Witt, Bernd Wagner

Fraunhofer Institute for Silicon Technology (Germany)

Klaus Doerschel, Rijk Schuetz

Laser-und Medizin Technologie gGmbH (Germany)

Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, 29 (September 2, 1999); doi:10.1117/12.361269
Text Size: A A A
From Conference Volume 3878

  • Miniaturized Systems with Micro-Optics and MEMS
  • M. Edward Motamedi; Rolf Goering
  • Santa Clara, CA | September 20, 1999

abstract

A compact two-mirror microscanner has been fabricated to build the central part of a miniaturized confocal laser scanning microscope. This microscope shall be mounted at the tip of an endoscope to provide high resolution imaging for medical diagnostics. In order to achieve a resolution of 500 X 500 image elements large scan angles and also large mirror dimensions have to be realized within a spatially strong limited housing. While bulk silicon technology on the one hand enables fabrication of micromirrors with nearly ideal elastical behavior, those actuators on the other hand often are too fragile for a lot of applications. This paper describes the design, fabrication and assembling of electrostatically driven torsional micromirrors that meet the requirements of fast two-dimensional scanning with high angular precision over large scan angles, compact design and also high shock resistance. This is achieved with the combination of bulk silicon technology with metal surface micromachining. Besides medical diagnostics these microscanners can be used in a wider range of applications such as displays, two-dimensional barcode scanning, multiplexing of fiber optics, etc.

© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Ulrich Hofmann ; Sascha Muehlmann ; Martin Witt ; Klaus Doerschel ; Rijk Schuetz, et al.
"Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, 29 (September 2, 1999); doi:10.1117/12.361269; http://dx.doi.org/10.1117/12.361269


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.