Self-aligned assembly of microlens arrays with micromirrors

Adisorn Tuantranont; Victor M. Bright; Wenge Zhang; Jianglong Zhang; Y. C. Lee

doi:10.1117/12.361293

2 September 1999 Self-aligned assembly of microlens arrays with micromirrors

Adisorn Tuantranont, Victor M. Bright, Wenge Zhang, Jianglong Zhang, Y. C. Lee

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361293
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Lenslet integrated Micro-Electro-Mechanical Deformable Micromirrors (LMEM-DMs) are electrostatic micromirror arrays fabricated through a commercial surface micromachining process and integrated with polymer or glass microlenses. The electronics resins (Photo-BCB) which are photo-sensitive polymers were used to fabricate polymer microlens arrays. A 4 X 4 element photo-BCB Cyclotene microlens array was fabricated on a thin quartz substrate. Self-aligned soldering flip-chip assembly is applied to integrate microlens arrays directly over the micromirrors. The lens/mirror gap is controlled using the final height of solder balls, and the lateral alignment is achieved by the solder self-aligning mechanism. The LMEM-DM is attractive due to its low cost and the low drive voltages. The use of a lenslet to focus the incoming laser beam onto the reflective surface of a micromirror substantially increases overall optical fill factor of the micromirror array. The LMEM-DM provides superior aberration correction with low residual diffraction effects. For mirror deflections much smaller than the lenslet focal length, the LMEM-DM behaves as a phase-only modulating optical element. The LMEM-DM thus serves as a rugged, compact optical element for beam steering, beam shaping, and aberration correction applications.

Citation Download Citation

Adisorn Tuantranont, Victor M. Bright, Wenge Zhang, Jianglong Zhang, and Y. C. Lee "Self-aligned assembly of microlens arrays with micromirrors", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361293

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