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Proceedings Article

Surface texturing of crystalline silicon and effective area measurement

[+] Author Affiliations
Tietun Sun, Dong Chen, Rongqiang Chui

Shanghai Jiao Tong Univ. (China)

Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, 116 (November 29, 2000); doi:10.1117/12.408408
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From Conference Volume 4086

  • Fourth International Conference on Thin Film Physics and Applications
  • Junhao Chu; Pulin Liu; Yong Chang
  • Shanghai, China | May 08, 2000

abstract

In this paper, the surface area of solar cell is determined by the capacitance measurements of MOS structure. The texture etching technology can be controlled according to the change of silicon surface area, furthermore, the textured silicon surface and interface characteristic of solar cell can be studied by measuring the relationship of capacitance and voltage for MOS structure.

© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Tietun Sun ; Dong Chen and Rongqiang Chui
"Surface texturing of crystalline silicon and effective area measurement", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, 116 (November 29, 2000); doi:10.1117/12.408408; http://dx.doi.org/10.1117/12.408408


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