Mechanism of formation and photoluminescence of Si quantum dots embedded in amorphous SiO2 matrix

Yu Liang; Yan Jia; Yichun Liu; Yuxue Liu; De Zen Shen; Yuling Sun; Zhongmin Su

doi:10.1117/12.408423

29 November 2000 Mechanism of formation and photoluminescence of Si quantum dots embedded in amorphous SiO₂ matrix

Yu Liang, Yan Jia, Yichun Liu, Yuxue Liu, De Zen Shen, Yuling Sun, Zhongmin Su

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408423
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Films of a-SiO_x with different oxygen content were deposited by electron cyclotron resonance microwave plasma technique at room temperature, where the films were annealed in an Ar ambient for 30 minutes at temperatures range from 250 to 1050 degree(s)C. The system of nc-Si quantum dots dispersed in SiO₂ matrix was obtained for the films annealed at 1050 degree(s)C. The structural change induced from annealing was characterized by infrared and Raman spectra, which was correlated with the identification of luminescence centers. A broad photoluminescence band centered at 750 and 770 nm is attributed to the quantum confinement effect of the Si clusters. Another PL band between 560 - 620 nm is attributed to the defects in the interfacial regions: self- trapped excitons.

Citation Download Citation

Yu Liang, Yan Jia, Yichun Liu, Yuxue Liu, De Zen Shen, Yuling Sun, and Zhongmin Su "Mechanism of formation and photoluminescence of Si quantum dots embedded in amorphous SiO₂ matrix", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408423

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available