Present status of excimer laser exposure apparatus

Akiyoshi Suzuki

doi:10.1117/12.405704

6 November 2000 Present status of excimer laser exposure apparatus

Akiyoshi Suzuki

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405704
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

One of the most important technical driving forces for IC manufacturing is lithography. IC manufacturing equipment is required to work in sever full-time operation, such as 24 hours a day and 7 days a week. KrF laser, however, has established its status, and has proven the applicability of excimer laser itself. The transition from super high pressure mercury lamp (i-line:365nm) to KrF laser was a natural trend, because the resolution is improved proportionally with shorter wavelength. Practical resolution is now said to attain half the wavelength, using high NA optics and imaging tricks, such as phase shifting masks, oblique illumination, etc. At present, 130nm resolution is pursued using a KrF laser and a projection lens whose NA is nearly 0.7. ArF laser lithography is also under extensive development. In the initial stage, it has proven 120nm resolution with an NA 0.6 projection lens, and now aims at 100nm resolution of 4G-bit DRAM as the next generation. The light source development always comes first in lithography, and F2 laser technology is now paid much attention.

Citation Download Citation

Akiyoshi Suzuki "Present status of excimer laser exposure apparatus", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405704

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available