Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by reactive evaporation, IAD, and PIAD

Roland Thielsch; Torsten Feigl; Norbert Kaiser; Sven Martin; Salvatore Scaglione; Francesca Sarto; Marco Alvisi; Antonella Rizzo

doi:10.1117/12.379310

3 March 2000 Comparison of the optical properties and UV radiation resistance of HfO₂ single layers deposited by reactive evaporation, IAD, and PIAD

Roland Thielsch, Torsten Feigl, Norbert Kaiser, Sven Martin, Salvatore Scaglione, Francesca Sarto, Marco Alvisi, Antonella Rizzo

Author Affiliations +

Proceedings Volume 3902, Laser-Induced Damage in Optical Materials: 1999; (2000) https://doi.org/10.1117/12.379310
Event: Laser-Induced Damage in Optical Materials: 1999, 1999, Boulder, CO, United States

Abstract

HfO₂ is one of the most important high index thin film materials for the manufacture of interference coatings in the DUV spectral region down to 248 nm. High quality coatings and multilayer interference systems in conjunction with SiO₂ as low index material can be deposited by various PVD technologies including reactive e-beam evaporation (RE), ion assisted deposition (IAD) and plasma ion assisted deposition (PIAD). Thin HfO₂ films with optical thickness up to 3(lambda) /4 were deposited by RE, IAD and PIAD onto fused silica. The optical and structural properties of these films were investigated. The optical properties are related to the film structure and film density. The interaction of UV radiation with photon energies close to the band gap of HfO₂ with different films was studied. LIDT at 248 nm were determined in the 1- on-1 and the 1000-on-1 test mode in dependence on the deposition technology and the film thickness. LIDT values of all investigated films decrease with increasing thickness due to the higher absorption and defect density. Additionally, data on the radiation resistance of interference coatings containing HfO₂ will be presented.

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Roland Thielsch, Torsten Feigl, Norbert Kaiser, Sven Martin, Salvatore Scaglione, Francesca Sarto, Marco Alvisi, and Antonella Rizzo "Comparison of the optical properties and UV radiation resistance of HfO₂ single layers deposited by reactive evaporation, IAD, and PIAD", Proc. SPIE 3902, Laser-Induced Damage in Optical Materials: 1999, (3 March 2000); https://doi.org/10.1117/12.379310

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