Critical issues on the assessment of laser-induced damage thresholds of fluoride multilayer coatings at 193 nm

Roland Thielsch; Joerg Heber; Norbert Kaiser; Sven Martin; Eberhard Welsch

doi:10.1117/12.379309

3 March 2000 Critical issues on the assessment of laser-induced damage thresholds of fluoride multilayer coatings at 193 nm

Roland Thielsch, Joerg Heber, Norbert Kaiser, Sven Martin, Eberhard Welsch

Author Affiliations +

Proceedings Volume 3902, Laser-Induced Damage in Optical Materials: 1999; (2000) https://doi.org/10.1117/12.379309
Event: Laser-Induced Damage in Optical Materials: 1999, 1999, Boulder, CO, United States

Abstract

Optimization of deposition technologies improves the laser resistivity of fluoride multilayer coatings at wavelengths as short as 193 nm.

Citation Download Citation

Roland Thielsch, Joerg Heber, Norbert Kaiser, Sven Martin, and Eberhard Welsch "Critical issues on the assessment of laser-induced damage thresholds of fluoride multilayer coatings at 193 nm", Proc. SPIE 3902, Laser-Induced Damage in Optical Materials: 1999, (3 March 2000); https://doi.org/10.1117/12.379309

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