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Proceedings Article

Coated optics for DUV excimer laser application

[+] Author Affiliations
Jens Ullmann, Michael Mertin

Carl Zeiss (Germany)

Hans Lauth, Helmut Bernitzki

JENOPTIK Laser, Optik, Systeme (Germany)

Klaus R. Mann

Laser-Lab. Goettingen e.V. (Germany)

Detlev Ristau, Winfried Arens

Laser Zentrum Hannover e.V. (Germany)

Roland Thielsch, Norbert Kaiser

Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)

Proc. SPIE 3902, Laser-Induced Damage in Optical Materials: 1999, 514 (March 3, 2000); doi:10.1117/12.379348
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From Conference Volume 3902

  • Laser-Induced Damage in Optical Materials: 1999
  • Gregory J. Exarhos; Arthur H. Guenther; Mark R. Kozlowski; Keith L. Lewis; M. J. Soileau
  • Boulder, CO | October 04, 1999

abstract

Recent developments of DUV-excimer laser applications have gained in demands for radiation resistant coated components at interesting wavelengths. To meet the requirements of long term reliability and high pulse number throughput superior performance of the optical components with lowest absorption and scattering losses are necessary. In the framework of the German Joint Research Project OPUS II efforts are made to investigate the optical properties, the radiation resistance and long term stability of single layers and layer system of interest in the DUV. The evaluation of optical coatings and coating system on different substrate materials was carried out by scattering experiments, atomic force microscopy, IR spectroscopy, calorimetric absorption measurements, and determination of laser induced damage threshold. Additionally, from the spectralphotometric measurements the optical behavior of the films was examined.

© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Jens Ullmann ; Michael Mertin ; Hans Lauth ; Helmut Bernitzki ; Klaus R. Mann, et al.
"Coated optics for DUV excimer laser application", Proc. SPIE 3902, Laser-Induced Damage in Optical Materials: 1999, 514 (March 3, 2000); doi:10.1117/12.379348; http://dx.doi.org/10.1117/12.379348


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