We designed Apo 100X NA 1.65 and Plan Apo 60X NA 1.45 objective lenses. When we use three lenses for water- immersed specimens, the marginal angle available for the total internal reflection becomes larger compared with NA 1.40 objective lens. Therefore, the alignment of the laser beam to the objective lens becomes very easy. We also designed the TIRFM illuminator. A single mode fiber is connected between the laser and illuminator. The laser beam is conducted through the fiber and supplied to the illuminator with a pre-adjusted positioning. Almost no additional alignment of illumination light is necessary.© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.