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Proceedings Article

3D profilometry by analysis of noisy white-light interferograms

[+] Author Affiliations
Seok-moon Ryoo, Tae-Sun Choi

Kwangju Institute of Science and Technology (South Korea)

Proc. SPIE 3919, Three-Dimensional and Multidimensional Microscopy: Image Acquisition Processing VII, 152 (May 2, 2000); doi:10.1117/12.384190
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From Conference Volume 3919

  • Three-Dimensional and Multidimensional Microscopy: Image Acquisition Processing VII
  • Jose-Angel Conchello; Carol J. Cogswell; Andrew G. Tescher; Tony Wilson
  • San Jose, CA | January 22, 2000

abstract

Using a white-light interference for high-precision surface structure analysis, 3D profilometry is realized. White-light surface profilers record the position of peak fringe contrast modulating the optical path difference of an imaging interferometer. This method is sensitive to random noise, such as spike or missing data points, which can be interpreted as positions of high fringe contrast. In order to overcome this problem, a median filter is employed for noise reduction of the acquired profile. Interferograms are generated simultaneously by scanning an object in a direction perpendicular to the object surface. These interferograms are filtered by the median filter, the surface height for each point of the image is obtained by finding the position of peak fringe contrast by extended depth from focus. It is shown in the experiment that the proposed method is able to cope with distortions of the fringe contrast envelope of noisy white-light interferograms without smoothing peak fringe contrast and distorting the position of peak. Moreover, the computation becomes fast and simple by using the advanced algorithm, which does not use complex spatial frequency domain processing.

© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Seok-moon Ryoo and Tae-Sun Choi
"3D profilometry by analysis of noisy white-light interferograms", Proc. SPIE 3919, Three-Dimensional and Multidimensional Microscopy: Image Acquisition Processing VII, 152 (May 2, 2000); doi:10.1117/12.384190; http://dx.doi.org/10.1117/12.384190


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