Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Micromachined deformable mirror for optical wavefront compensation

[+] Author Affiliations
Thomas G. Bifano, Julie A. Perreault

Boston Univ. (USA)

Paul A. Bierden

Boston Micromachines Corp. (USA)

Proc. SPIE 4124, High-Resolution Wavefront Control: Methods, Devices, and Applications II, 7 (November 22, 2000); doi:10.1117/12.407508
Text Size: A A A
From Conference Volume 4124

  • High-Resolution Wavefront Control: Methods, Devices, and Applications II
  • John D. Gonglewski; Mikhail A. Vorontsov; Mark T. Gruneisen
  • San Diego, CA, USA | July 30, 2000

abstract

A silicon micromachined deformable mirror ((mu) DM) has been developed by Boston University and Boston Micromachines Corporation (BMC). The (mu) DM employs a flexible silicon mirror supported by mechanical attachments to an array of electrostatic parallel plate actuators. The integrated system of mirror and actuators was fabricated by surface micromachining using polycrystalline silicon thin films. The mirror itself measures 3 mm X 3 mm X 3 micrometer, supported by a square array of 140 electrostatic parallel- electrode actuators through 140 attachment posts. Recently, this (mu) DM was characterized for its electro-mechanical and optical behavior and then integrated into two laboratory-scale adaptive optics systems as a wavefront correction device. Figures of merit for the system include stroke of 2 micrometer, resolution of 10 nm, and frequency bandwidth of 6.7 kHz. The device is compact, exhibits no hysteresis, and has good optical quality.

© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Thomas G. Bifano ; Julie A. Perreault and Paul A. Bierden
"Micromachined deformable mirror for optical wavefront compensation", Proc. SPIE 4124, High-Resolution Wavefront Control: Methods, Devices, and Applications II, 7 (November 22, 2000); doi:10.1117/12.407508; http://dx.doi.org/10.1117/12.407508


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.