Laser-based facet inspection system

Jens Wolfgang Tomm; A. Baerwolff; Ch. Lier; Thomas Elsaesser; Franz X. Daiminger; Stefan Heinemann

doi:10.1117/12.263481

10 January 1997 Laser-based facet inspection system

Jens Wolfgang Tomm, A. Baerwolff, Ch. Lier, Thomas Elsaesser, Franz X. Daiminger, Stefan Heinemann

Proceedings Volume 3000, Laser Diode and LED Applications III; (1997) https://doi.org/10.1117/12.263481
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

We developed a laser based inspection system which was used to monitor defect distributions in optoelectronic devices such as diode lasers. Basically the system works as the well-known laser beam induced current (LBIC) technique. Various lasers emitting in the 633-1300 nm wavelength range were employed as excitation source. A number of high power laser diode arrays (LDA) aged under different aging conditions (parameters: injection current, heat sink temperature, time) were inspected with the system. The scans obtained revealed significant differences for different aging levels of arrays. This finding allows us to determine the aging status of LDA and contributes to find methods for giving failure predictions for individual devices.

Citation Download Citation

Jens Wolfgang Tomm, A. Baerwolff, Ch. Lier, Thomas Elsaesser, Franz X. Daiminger, and Stefan Heinemann "Laser-based facet inspection system", Proc. SPIE 3000, Laser Diode and LED Applications III, (10 January 1997); https://doi.org/10.1117/12.263481

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