We developed a laser based inspection system which was used to monitor defect distributions in optoelectronic devices such as diode lasers. Basically the system works as the well-known laser beam induced current (LBIC) technique. Various lasers emitting in the 633-1300 nm wavelength range were employed as excitation source. A number of high power laser diode arrays (LDA) aged under different aging conditions (parameters: injection current, heat sink temperature, time) were inspected with the system. The scans obtained revealed significant differences for different aging levels of arrays. This finding allows us to determine the aging status of LDA and contributes to find methods for giving failure predictions for individual devices.© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.