Paper
25 April 1997 Theoretical and experimental investigation of optical couplers in SOI
Thomas Zinke, Uwe Fischer, Berndt Schueppert, Klaus Petermann
Author Affiliations +
Abstract
Integrated Optics in SOI need a concept for passive optical couplers, which is highly insensitive to fabrication tolerances. For this purpose directional couplers as well as couplers based on Multi-Mode-Interference (MMI) have been investigated, both theoretically and experimentally. BESOI material with a top layer thickness of 11 micrometers is optimally adjusted to single-mode-fibers resulting in a field mismatch loss of 0.17 dB. For fabrication tolerances of 5%, only MMI- couplers showed an insensitive behavior with additional losses of 0.4 dB and a crosstalk (CRT) of -30 dB at a wavelength of 1.3 micrometers . A particular interest was paid to the additional coupling in the access region of the coupler, since there is no possibility to its compensation in this concept. The potential application of couplers in combination with phase shifters was studied theoretically as well. Realized MMI-based cross-couplers showed additional losses of 1 dB and a CRT of -17 dB, the best values for SOI-based couplers reported so far.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Zinke, Uwe Fischer, Berndt Schueppert, and Klaus Petermann "Theoretical and experimental investigation of optical couplers in SOI", Proc. SPIE 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices, (25 April 1997); https://doi.org/10.1117/12.273854
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Cited by 11 scholarly publications.
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KEYWORDS
Waveguides

Tolerancing

Silicon

Directional couplers

Etching

Integrated optics

Refractive index

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