LIGA tunable spectral filter performance

J. Allen Cox; David C. Dobson; Thomas R. Ohnstein; J. David Zook

doi:10.1117/12.271426

11 April 1997 LIGA tunable spectral filter performance

J. Allen Cox, David C. Dobson, Thomas R. Ohnstein, J. David Zook

Proceedings Volume 3008, Miniaturized Systems with Micro-Optics and Micromechanics II; (1997) https://doi.org/10.1117/12.271426
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Using LIGA techniques, a transmissive diffraction grating device in permalloy with variable, and controllable, grating period has been designed and fabricated for use as a tunable infrared spectral filer. Typical device parameters exhibit parameters exhibit periods approximately 8-30 microns, permalloy grating lines approximately 3 microns wide by 10- 50 microns high. In Ell polarization, the device acts as low pass spectral filter with cutoff wavelength determined by the variable grating period. Recent developments in fabrication of the gratin structure and actuator are reviewed briefly. Emphasis is given to results of recent performance modeling both for thinner and shorter grating walls suitable for shorter wavelength applications and to demonstrate the effects of an incident spherical wave.

Citation Download Citation

J. Allen Cox, David C. Dobson, Thomas R. Ohnstein, and J. David Zook "LIGA tunable spectral filter performance", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271426

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