Electromagnetic near field induced by surface defects in microstructures

Zhi-Yuan Li; Guozhen Yang; Ben-Yuan Gu

doi:10.1117/12.271433

11 April 1997 Electromagnetic near-field induced by surface defects in microstructures

Zhi-Yuan Li, Guozhen Yang, Ben-Yuan Gu

Proceedings Volume 3008, Miniaturized Systems with Micro-Optics and Micromechanics II; (1997) https://doi.org/10.1117/12.271433
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

An intersecting waveguide modulator which utilizes the carrier injection effects is presented and characterized. Using O⁺ implantation to render the implanted region electrically inactive, a well confined injection carrier channel is formed. This area can be driven to function as waveguide or as antiwaveguide. A transversal electrode switches the modulator from the On-state to the Off-state or vice versa. By the use of carrier induced refractive index modeling and the finite difference beam propagation method (FD-BPM) simulation, good performance and small injection current ofthis modulator are predicted.

Citation Download Citation

Zhi-Yuan Li, Guozhen Yang, and Ben-Yuan Gu "Electromagnetic near-field induced by surface defects in microstructures", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271433

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