Field-emitter array development for field-emission displays

Capp A. Spindt; Chris E. Holland; Paul R. Schwoebel

doi:10.1117/12.379975

17 March 2000 Field-emitter array development for field-emission displays

Capp A. Spindt, Chris E. Holland, Paul R. Schwoebel

Proceedings Volume 3955, Liquid Crystal Materials, Devices, and Flat Panel Displays; (2000) https://doi.org/10.1117/12.379975
Event: Electronic Imaging, 2000, San Jose, CA, United States

Abstract

In this paper we report recent results from an ongoing program designed to develop a fundamental understanding of the effects of materials, vacuum deposition parameters, and post fabrication processing on the performance of field-emitter arrays for displays. Molybdenum and silicon have been the materials of choice for first generation displays, and have produced acceptable results for the first trials. However, investigations of other emitter materials such as diamond- like-carbon (DLC) and zirconium carbide (ZrC) have produced intriguing improvements in emission performance. In addition in situ processes such as coating of molybdenum and silicon emitters with alternate materials and aggressive emitter- surface cleaning processes such as hydrogen-plasma cleaning and emission-stimulated desorption by high-current pulses, have also been shown to be beneficial. It has also been shown that when using the Spindt emitter fabrication process the emitter cone can be tailored to a preferred shape by appropriate materials selection and manipulation of the emitter deposition parameters. Finally, it is shown that the details of the emitter tip shape can have an impact on the performance of the emitter due to the dynamics of temperature and field-induced surface diffusion during cathode operation. Emitter tips of the same material, operated in the same environment and at the same emission levels can behave very differently depending on the details of the emitter-tip geometry.

Citation Download Citation

Capp A. Spindt, Chris E. Holland, and Paul R. Schwoebel "Field-emitter array development for field-emission displays", Proc. SPIE 3955, Liquid Crystal Materials, Devices, and Flat Panel Displays, (17 March 2000); https://doi.org/10.1117/12.379975

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available