Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

X-ray zone plate fabrication using a focused ion beam

[+] Author Affiliations
Peter P. Ilinski, Barry P. Lai

Argonne National Lab. (USA)

Neil J. Bassom, Jason Donald, Gregory J. Athas

FEI Corp. (USA)

Proc. SPIE 4145, Advances in X-Ray Optics, 311 (January 5, 2001); doi:10.1117/12.411652
Text Size: A A A
From Conference Volume 4145

  • Advances in X-Ray Optics
  • Andreas K. Freund; Tetsuya Ishikawa; Ali M. Khounsary; Derrick C. Mancini; Alan G. Michette; Sebastian Oestreich
  • San Diego, CA, USA | July 30, 2000

abstract

An x-ray zone plate was fabricated using the novel approach of focused ion beam (FIB) milling. The FIB technique was developed in recent years, it has been successfully used for transmission electron microscopy (TEM) sample preparation, lithographic mask repair, and failure analysis of semiconductor devices. During FIB milling, material is removed by the physical sputtering action of ion bombardment. The sputter yield is high enough to remove a substantial amount of material, therefore FIB can perform a direct patterning with submicron accuracy. We succeeded in fabricating an x-ray phase zone plate using the Micrion 9500HT FIB station, which as a 50 kV Ga+ column. Circular Fresnel zones were milled in a 1.0-micrometer-thick TaSiN film deposited on a silicon wafer. The outermost zone width of the zone plate is 170 nm at a radius of 60 micrometer. An achieved aspect ratio was 6:1.

© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Peter P. Ilinski ; Barry P. Lai ; Neil J. Bassom ; Jason Donald and Gregory J. Athas
"X-ray zone plate fabrication using a focused ion beam", Proc. SPIE 4145, Advances in X-Ray Optics, 311 (January 5, 2001); doi:10.1117/12.411652; http://dx.doi.org/10.1117/12.411652


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.