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Proceedings Article

Varied-line-spacing laminar-type holographic grating for the standard soft x-ray flat-field spectrograph

[+] Author Affiliations
Masato Koike, Noboru Miyata, Tokuo Ogiwara, Osamu Yoda, Shiro Nagai

Japan Atomic Energy Research Institute (Japan)

Takeshi Namioka, Sadayuki Ishikawa, Takashi Imazono, Mihiro Yanagihara

Tohoku Univ. (Japan)

Eric M. Gullikson, Stanley Mrowka, James H. Underwood

Lawrence Berkeley National Lab. (USA)

Yoshihisa Harada, Kazuo Sano

Shimadzu Corp. (Japan)

Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, 163 (November 8, 2000); doi:10.1117/12.406669
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From Conference Volume 4146

  • Soft X-Ray and EUV Imaging Systems
  • Winfried M. Kaiser; Richard H. Stulen
  • San Diego, CA, USA | July 30, 2000

abstract

An aspheric wave-front recording system was designed to produce a holographic grating for use in a standard soft X- ray flat field spectrograph interchangeable with a mechanically ruled varied-line-spacing (VLS) grating. The grating grooves recorded with the designed aspheric wave- front recording system were processed to form a laminar groove profile by means of reactive ion etching. Measurements done with synchrotron radiation and a laboratory X-ray source are reported for this laminar-type grating and a commercial grating replicated from a mechanically ruled VLS grating that was specifically designed and fabricated for the standard soft X-ray flat- field spectrography. The laminar-type holographic grating is found to have an absolute first-order efficiency of approximately 10% for wavelengths of approximately 4.5 - 12 nm. It is also shown that the holographic grating is effective in suppressing the higher orders and stray-light level for soft X-ray of 4.36 nm (C-K) and has a comparable spectral resolution to the replica VLS grating.

© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Masato Koike ; Takeshi Namioka ; Eric M. Gullikson ; Yoshihisa Harada ; Sadayuki Ishikawa, et al.
"Varied-line-spacing laminar-type holographic grating for the standard soft x-ray flat-field spectrograph", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, 163 (November 8, 2000); doi:10.1117/12.406669; http://dx.doi.org/10.1117/12.406669


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