0

Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Three-dimensional nonplanar lithography simulation using a periodic fast multipole method

[+] Author Affiliations
Michael S. Yeung, Eytan Barouch

Boston Univ. (USA)

Proc. SPIE 3051, Optical Microlithography X, 509 (July 7, 1997); doi:10.1117/12.276030
Text Size: A A A
From Conference Volume 3051

  • Optical Microlithography X
  • Gene E. Fuller
  • Santa Clara, CA | March 10, 1997

abstract

This paper discusses an extension of the fast multipole method to electromagnetic scattering from doubly periodic, multilayer wafer topography. The novelty of our approach lies in the use of a pseudo-periodic translation operator which can be computed efficiently using fast Fourier transform. Results obtained using the rigorous boundary conditions for dielectric surfaces are compared with those obtained using the approximate impedance boundary condition. The latter is shown to give good results for the type of topography usually encountered in lithography simulation. Results of reflective-notching simulation using the IBC method are presented.

© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Michael S. Yeung and Eytan Barouch
"Three-dimensional nonplanar lithography simulation using a periodic fast multipole method", Proc. SPIE 3051, Optical Microlithography X, 509 (July 7, 1997); doi:10.1117/12.276030; http://dx.doi.org/10.1117/12.276030


Access This Article
Sign In to Access Full Content
Please Wait... Processing your request... Please Wait.
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
 

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


Buy this article ($18 for members, $25 for non-members).
Sign In