Compact pressure- and structure-based gas flow model for microvalves

Albert K. Henning

doi:10.1117/12.395614

11 August 2000 Compact pressure- and structure-based gas flow model for microvalves

Albert K. Henning

Proceedings Volume 4175, Materials and Device Characterization in Micromachining III; (2000) https://doi.org/10.1117/12.395614
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The advent of microfluidic systems demands compact models for the description of flow in the constituent system components. The situation is analogous to the evolution of compact models for electron flows in MOSFETs, which were essential for the development of integrated microelectronic systems. We develop here a compact gas flow model for microvalves, which relates valve flow to a limited but meaningful set of parameters. Specifically, these are the gas type; inlet and outlet pressures; ambient temperature; valve inlet diameter; the gap between the membrane and the valve inlet; and the coefficient of discharge of the valve inlet. The result is a simple, accurate model, appropriate for the design and analysis of microfluidic systems. We also demonstrate a characterization methodology for extracting the required model parameters from measurements of flow versus pressure and gap. This characterization has produced values for the coefficient of discharge, which match expectations based on previous theory and measurement. It has also produced a single parameter describing the effect of the gap in controlling the flow, across broad ranges of valve inlet diameter, membrane-to-inlet gap, and pressure.

Citation Download Citation

Albert K. Henning "Compact pressure- and structure-based gas flow model for microvalves", Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); https://doi.org/10.1117/12.395614

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