Advantages of scanned-beam MOEMS approach to microdisplay and related applications

Todd R. McIntyre; Thor D. Osborn; Radu G. Andrei

doi:10.1117/12.396484

22 August 2000 Advantages of scanned-beam MOEMS approach to microdisplay and related applications

Todd R. McIntyre, Thor D. Osborn, Radu G. Andrei

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396484
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The technical and economic rationale for the selection and use of MEMS optical scanning devices for Retinal Scanning Display systems is discussed. While several new technologies and manufacturing approaches to microdisplays have been proposed and demonstrated in the display industry, a number of significant challenges related to cost and complexity of fabricating very dense integrated matrix displays are observed. Factors relating to the choice of a MEMS-based scanned beam approach are presented with special emphasis on the economics of silicon processing and light valve manufacturing. Related imaging applications for the high-precision scanning capabilities of the MEMS scanner are described.

Citation Download Citation

Todd R. McIntyre, Thor D. Osborn, and Radu G. Andrei "Advantages of scanned-beam MOEMS approach to microdisplay and related applications", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396484

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