Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Polymer UV-molding for micro-optical systems and O/E-integration

[+] Author Affiliations
Peter Dannberg, Gunnar Mann, Lars Wagner, Andreas H. Braeuer

Fraunhofer-Institut fuer Angewandte Optik & Feinmechanik (Germany)

Proc. SPIE 4179, Micromachining Technology for Micro-Optics, 137 (August 18, 2000); doi:10.1117/12.395684
Text Size: A A A
From Conference Volume 4179

  • Micromachining Technology for Micro-Optics
  • Sing H. Lee; Eric G. Johnson
  • Santa Clara, CA | September 18, 2000

abstract

The potential and limits of micromoulding technology for the wafer scale hybrid integration of micro-optic elements on top of arbitrary substrates like glass, Silicon, III/V-semiconductors by a process which is performed in a modified contact mask aligner. The elements are characterised by high precision and stability, temperature stable and precise pitch, index, homogeneity, uniformity across the wafer, and they fulfill additional requirements for a practical application (AR-coating, separation in a dicing saw). Additionally, the technology for a two- sided replication of elements has been developed. The precision of lens arrays fabricated by reflow and UV-moulding is investigated, and the high performance of these arrays in the collimation of fiber arrays is shown. Steps toward a wafer scale integration of lens arrays with vertical cavity surface emitting lasers (VCSELs) by locally selective replication are demonstrated.

© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Peter Dannberg ; Gunnar Mann ; Lars Wagner and Andreas H. Braeuer
"Polymer UV-molding for micro-optical systems and O/E-integration", Proc. SPIE 4179, Micromachining Technology for Micro-Optics, 137 (August 18, 2000); doi:10.1117/12.395684; http://dx.doi.org/10.1117/12.395684


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.