Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Radiation and photochemistry of onium salt acid generators in chemically amplified resists

[+] Author Affiliations
Seiichi Tagawa, Seiji Nagahara, Toshiyuki Iwamoto, Masanori Wakita, Takahiro Kozawa, Yukio Yamamoto

Osaka Univ. (Japan)

David Werst, Alexander D. Trifunac

Argonne National Lab. (USA)

Proc. SPIE 3999, Advances in Resist Technology and Processing XVII, 204 (June 23, 2000); doi:10.1117/12.388304
Text Size: A A A
From Conference Volume 3999

  • Advances in Resist Technology and Processing XVII
  • Francis M. Houlihan
  • Santa Clara, CA | February 27, 2000

abstract

The difference in photochemistry and radiation chemistry of sulfonium salt acid generator was investigated by product analysis and time resolved spectroscopic methods for chemically amplified resist application. After KrF excimer laser and electron beam irradiation of sulfonium salt, yields of decomposed products including acid were determined. The ultra fast in-cage reactions after laser irradiation were directly observed by the femtosecond laser flash photolysis method. Intermediates after electron beam irradiation were observed by nanosecond electron beam pulse radiolysis. From both the product analysis and time resolved spectroscopic methods, the contribution of each reaction pathway to acid generation was determined.

© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Seiichi Tagawa ; Seiji Nagahara ; Toshiyuki Iwamoto ; Masanori Wakita ; Takahiro Kozawa, et al.
"Radiation and photochemistry of onium salt acid generators in chemically amplified resists", Proc. SPIE 3999, Advances in Resist Technology and Processing XVII, 204 (June 23, 2000); doi:10.1117/12.388304; http://dx.doi.org/10.1117/12.388304


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.