Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Improved patterning quality of SU-8 microstructures by optimizing the exposure parameters

[+] Author Affiliations
Zhong G. Ling, Kun Lian

Louisiana State Univ. (USA)

Linke Jian

Xian Jiaotong Univ. (Germany)

Proc. SPIE 3999, Advances in Resist Technology and Processing XVII, 1019 (June 23, 2000); doi:10.1117/12.388266
Text Size: A A A
From Conference Volume 3999

  • Advances in Resist Technology and Processing XVII
  • Francis M. Houlihan
  • Santa Clara, CA | February 27, 2000

abstract

SU-8 has great potential in low cost ultra-thick high aspect ratio MEMS applications. Although a broad range of thickness (from micrometer to mm) can be obtained by spin coating, the works about the sidewall profile and dimension control of SU-8 microstructures have not been published in detail. This paper describes the detailed investigations on the effects of processing parameters such as UV wavelength and exposure dose on dimensional change and sidewall profile of SU-8 microstructures. The optimized processing parameters for SU-8 structures with the thickness from 10 to 360 micrometer are presented.

© (2000) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Zhong G. Ling ; Kun Lian and Linke Jian
"Improved patterning quality of SU-8 microstructures by optimizing the exposure parameters", Proc. SPIE 3999, Advances in Resist Technology and Processing XVII, 1019 (June 23, 2000); doi:10.1117/12.388266; http://dx.doi.org/10.1117/12.388266


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement

 

 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.