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Proceedings Article

High-precision surface profiling with broadband accordion fringe interferometry

[+] Author Affiliations
Gary J. Swanson, Matthew P. Kavalauskas, Lyle G. Shirley

MIT Lincoln Lab. (USA)

Proc. SPIE 4189, Machine Vision and Three-Dimensional Imaging Systems for Inspection and Metrology, 161 (February 12, 2001); doi:10.1117/12.417193
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From Conference Volume 4189

  • Machine Vision and Three-Dimensional Imaging Systems for Inspection and Metrology
  • Kevin G. Harding; John W. V. Miller; Bruce G. Batchelor
  • Boston, MA | November 05, 2000

abstract

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© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Gary J. Swanson ; Matthew P. Kavalauskas and Lyle G. Shirley
"High-precision surface profiling with broadband accordion fringe interferometry", Proc. SPIE 4189, Machine Vision and Three-Dimensional Imaging Systems for Inspection and Metrology, 161 (February 12, 2001); doi:10.1117/12.417193; http://dx.doi.org/10.1117/12.417193


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