Micromachining with DUV lasers

Hans Kurt Toenshoff; Heiner Kappel; Peter B. Heekenjann

doi:10.1117/12.271775

2 April 1997 Micromachining with DUV lasers

Hans Kurt Toenshoff, Heiner Kappel, Peter B. Heekenjann

Proceedings Volume 3091, Laser Applications Engineering (LAE-96); (1997) https://doi.org/10.1117/12.271775
Event: International Symposium on Intensive Laser Actions and Their Applications and Laser Applications Engineering, 1996, St. Petersburg-Pushkin, Russian Federation

Abstract

In many industrial branches a continuous scaling down of parts and products is observed. For example in the fields of micro-mechanics new sensors and actuators can be produced which offer the possibility of making self acting micro- systems. Other micro-components for medicine, chemistry or optics allow minimal invasive surgery and inspection. In every case conventional fabrication technologies such as turning and milling have to be carefully investigated: their appropriateness for the production of micro-parts is not always guaranteed. On the other hand new technologies such as the LIGA-process (German acronym for lithography, galvano forming and plastic molding process) open new ways to inexpensive mass-production. The following paper describes the potential of DUV-lasers (laser wavelength: lambda equals 200 - 280 nm) for micro-machining specific applications. Using excimer-lasers the machining of ceramics, glass and polymer materials is presented. The excellent beam properties of a self developed quadrupled Nd:YAG-laser are used for the repair of photolithographic masks. The mask repair using ablation and deposition of chromium on glass substrate is described.

Citation Download Citation

Hans Kurt Toenshoff, Heiner Kappel, and Peter B. Heekenjann "Micromachining with DUV lasers", Proc. SPIE 3091, Laser Applications Engineering (LAE-96), (2 April 1997); https://doi.org/10.1117/12.271775

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