Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Recent developments of industrial excimer laser technology

[+] Author Affiliations
Uwe Stamm, Rainer Paetzel, Igor Bragin, Juergen Kleinschmidt, Frank Voss

Lambda Physik GmbH (Germany)

Dirk Basting

Lambda Physik (Germany)

Proc. SPIE 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 485 (April 4, 1997); doi:10.1117/12.270114
Text Size: A A A
From Conference Volume 3092

  • XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
  • Edinburgh, United Kingdom | August 25, 1996

abstract

The paper reviews recent developments in high power excimer laser technology driven by industrial requirements. Technological achievements as NovaTubeTM laser tube technology and HaloSafeTM halogen generator technology are discussed. Experimental results are presented for various lasers at the most important excimer wavelengths 351 nm (XeF), 308 nm (XeCl), 248 nm (KrF), 193 nm (ArF) and 157 nm (F2) which have been designed for application in micromachining, thin-film-transistor annealing, marking as well as lithography.

© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Uwe Stamm ; Rainer Paetzel ; Igor Bragin ; Juergen Kleinschmidt ; Frank Voss, et al.
"Recent developments of industrial excimer laser technology", Proc. SPIE 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 485 (April 4, 1997); doi:10.1117/12.270114; http://dx.doi.org/10.1117/12.270114


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Proceedings Articles

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.