Comparison of the precision of a null-ellipsometer to an ellipsometer with a rotating analyzer

Eugene G. Bortchagovsky; O. M. Getsko

doi:10.1117/12.271825

1 April 1997 Comparison of the precision of a null-ellipsometer to an ellipsometer with a rotating analyzer

Eugene G. Bortchagovsky, O. M. Getsko

Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271825
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland

Abstract

Comparison of the precision of measurements by means of null-ellipsometer with rotating analyzer is made here on the base of the developed formalism. The dependence of measurement's errors on the reflectivity of an investigated system is taken into account and is the base of the presented comparison.

Citation Download Citation

Eugene G. Bortchagovsky and O. M. Getsko "Comparison of the precision of a null-ellipsometer to an ellipsometer with a rotating analyzer", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); https://doi.org/10.1117/12.271825

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