Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Laser-induced chemical vapor deposition of optical thin films on curved surfaces

[+] Author Affiliations
Shoshana Tamir, S. Berger

Technion--Israel Institute of Technology (Israel)

Kopel Rabinovitch, Mordechai Gilo, Reuben Dahan

ElOp Electrooptic Industries Ltd. (Israel)

Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, 517 (September 22, 1997); doi:10.1117/12.281399
Text Size: A A A
From Conference Volume 3110

  • 10th Meeting on Optical Engineering in Israel
  • Itzhak Shladov; Stanley R. Rotman
  • Jerusalem, Israel | March 02, 1997

abstract

Laser induced chemical vapor deposition (LCVD) of silicon nitride and silicon dioxide single and double layers have been investigated using excimer laser operating at a wavelength of 193 nm. The composition of silicon nitride which was formed in SiH4/NH3 gas mixture was nearly stochiometric having a refractive index of 1.8 - 1.9 and contained small amount of hydrogen. Deposition of silicon dioxide was investigated using SiH4/N2O. Using this gas mixture the film composition depended strongly upon the SiH4/N2O ratio. At high ratio the film formed was silicon oxynitride, which contained both Si-N and Si-O bonds. The film also contained small amount of Si-H bonds. Decreasing SiH4/N2O ratio led to the formalin of pure silicon dioxide with a refractive index of 1.45. A double layer coating of both silicon nitride and silicon dioxide resulted in the formation of antireflection coating with a reflectivity of about 0.5% at 750 nm.

© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Shoshana Tamir ; S. Berger ; Kopel Rabinovitch ; Mordechai Gilo and Reuben Dahan
"Laser-induced chemical vapor deposition of optical thin films on curved surfaces", Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, 517 (September 22, 1997); doi:10.1117/12.281399; http://dx.doi.org/10.1117/12.281399


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.