CGH-LUPI interferometer for aspheric figure metrology

Steven M. Arnold; Andrew P. Stuart; Lubomir Koudelka

doi:10.1117/12.295152

1 November 1997 CGH-LUPI interferometer for aspheric figure metrology

Steven M. Arnold, Andrew P. Stuart, Lubomir Koudelka

Proceedings Volume 3134, Optical Manufacturing and Testing II; (1997) https://doi.org/10.1117/12.295152
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

We have designed a nd built a phase-measuring LUPI interferometer to use pre-aligned custom CGH nulls for high accuracy figure metrology of deep aspherics. The CGH nulls operate in double pass, first producing an aspheric test wavefront and then recollimating the return wavefront. This eliminates any need to locate the CGH at an image of the test pupil THe CGH is common to both test and reference paths, allowing the use of photomask quality substrates. Tho enable the CGH-LUPI to test a wider variety of aspheres, we have designed and built a set of 100 mm aperture accessory optics for use in combination with CGH nulls. These accessory optics consist of five singles, each approximately F/3, which may be kinematically stacked in numerous combinations and permutations to produce test wavefronts ranging from nearly collimated to F/0.75 A CGH null compensates for asphericity of the test optic and design aberrations of the accessory optics. The interferometer and accessory optic designs permit independent verification of all aspects of system accuracy and calibration without the need for disassembly. Designing a custom CGH null involves raytracing the accessory optics but not the interferometer mainframe optics. Depending on the phase measuring algorithm selected, known system aberrations due to manufacturing tolerances may be software compensated in real time.

Citation Download Citation

Steven M. Arnold, Andrew P. Stuart, and Lubomir Koudelka "CGH-LUPI interferometer for aspheric figure metrology", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); https://doi.org/10.1117/12.295152

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