Vibration stabilization of a phase-shifting interferometer for large optics

Glen C. Cole; James H. Burge; Lee R. Dettmann

doi:10.1117/12.279132

1 November 1997 Vibration stabilization of a phase-shifting interferometer for large optics

Glen C. Cole, James H. Burge, Lee R. Dettmann

Proceedings Volume 3134, Optical Manufacturing and Testing II; (1997) https://doi.org/10.1117/12.279132
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Phase shifting interferometry requires an intentional shifting of the relative phase between the reference arm and the test arm of fan interferometry. Vibration can lead to uncertainty in the relative phase difference with respect to time and result in erroneous surface measurements. We have developed a method for actively compensating for vibration using a closed-loop phase servo system. An essential feature of this is a high frequency phase measurement. The phase is modulated and the intensity variations are measured with a high sped photodiode and digitized. This information is processed by a DSP and a five step algorithm is used to determine the instantaneous phase. These high speed phase measurements are used in a closed loop phase servo to compensate for vibration and also allow for phase shifting interferometry. Test results with and without the vibration compensation will be presented.

Citation Download Citation

Glen C. Cole, James H. Burge, and Lee R. Dettmann "Vibration stabilization of a phase-shifting interferometer for large optics", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); https://doi.org/10.1117/12.279132

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