Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications

Ulf Kleineberg; Hans-Juergen Stock; D. Menke; O. Wehmeyer; Ulrich Heinzmann; Detlef Fuchs; Peter Bulicke; Marco Wedowski; Gerhard Ulm; Klaus F. Heidemann; K. Osterried

doi:10.1117/12.283980

3 November 1997 Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications

Ulf Kleineberg, Hans-Juergen Stock, D. Menke, O. Wehmeyer, Ulrich Heinzmann, Detlef Fuchs, Peter Bulicke, Marco Wedowski, Gerhard Ulm, Klaus F. Heidemann, K. Osterried

Author Affiliations +

Proceedings Volume 3150, Gratings and Grating Monochromators for Synchrotron Radiation; (1997) https://doi.org/10.1117/12.283980
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

We report about the diffraction efficiencies of two new types of multilayer diffraction gratings, one of them being proposed for high spectral dispersion ability due to a high line density in the photon energy range around 90 eV, while the other is being proposed as a multilayer grating working in the water window spectral range around 470 eV at near normal incidence angles. For a 6600 L/mm sinusoidal interference grating coated with 18 Mo/Si doublelayers of d = 8.2 nm absolute diffraction efficiencies up to 11 % at a wavelength .\ = 13.2 nm were measured in each first diffraction order. A 2400 L/mm laminar grating was coated with 60 Ti/C bilayers of d = 2.2 nm for high efficiency in the water window spectral range near the Ti-L edge (.\ = 2.77 nm). For a similar Ti/C multilayer mirror refiectivities of 11 % were measured at a wavelength ) = 2.7 nm and an angle of incidence a = 59 deg. First order diffraction efficiencies of about 0.7 % were measured for the Ti/C multilayer grating.

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Ulf Kleineberg, Hans-Juergen Stock, D. Menke, O. Wehmeyer, Ulrich Heinzmann, Detlef Fuchs, Peter Bulicke, Marco Wedowski, Gerhard Ulm, Klaus F. Heidemann, and K. Osterried "Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications", Proc. SPIE 3150, Gratings and Grating Monochromators for Synchrotron Radiation, (3 November 1997); https://doi.org/10.1117/12.283980

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KEYWORDS

Multilayers

Diffraction gratings

Diffraction

Reflectivity

Coating

Interfaces

X-ray diffraction

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