Vertical scanning long trace profiler: a tool for metrology of x-ray mirrors

Haizhang Li; Peter Z. Takacs; Tom Oversluizen

doi:10.1117/12.295557

1 November 1997 Vertical scanning long trace profiler: a tool for metrology of x-ray mirrors

Haizhang Li, Peter Z. Takacs, Tom Oversluizen

Proceedings Volume 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors; (1997) https://doi.org/10.1117/12.295557
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

This paper describes the development of a prototype instrument of the Vertical Scanning Long Trace Profiler (VSLTP) under a SBIR Phase II grant from NASA. The instrument is capable of scanning shell mirrors with a diameter as small as 100 mm for a travel distance of 700 mm in vertical configuration. Main components of the optical system are described. It has a beam separation set, a beam splitting set, a Fourier transform lens system, a penta prism pair, a Risley prism pair and a cylinder lens. The main hardware and software for implementation of the prototype instrument are also presented. They include the major mechanical structure, 9-axis motion control system and the data acquisition and analysis software. The design of the optical and mechanical systems makes the VSLTP very tolerable to the deformation of the slide deformation, laser pattern shift and fluctuation due to temperature change. Results obtained from the Phase I show that the VSLTP instrument is capable of a measurement accuracy of 50 nm for the height and 1 microradian for the slope.

Citation Download Citation

Haizhang Li, Peter Z. Takacs, and Tom Oversluizen "Vertical scanning long trace profiler: a tool for metrology of x-ray mirrors", Proc. SPIE 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors, (1 November 1997); https://doi.org/10.1117/12.295557

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