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Proceedings Article

Radial shearing interferometer for in-process measurement of diamond turning

[+] Author Affiliations
Tsuguo Kohno, Daishi Matsumoto, Takanori Yazawa

Tokyo Metropolitan Institute of Technology (Japan)

Yutaka Uda

Nikon Co. (Japan)

Proc. SPIE 3173, Ultrahigh- and High-Speed Photography and Image-based Motion Measurement, 280 (December 12, 1997); doi:10.1117/12.294519
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From Conference Volume 3173

  • Ultrahigh- and High-Speed Photography and Image-based Motion Measurement
  • Andrew Davidhazy; Takeharu G. Etoh; C. Bruce Johnson; Donald R. Snyder; James S. Walton
  • San Diego, CA, United States | July 27, 1997

abstract

A stable interferometer using two zone plates to measure concave mirror figure is developed. The principle of the measurement is based on the radial shearing interference in which the measuring wavefront from the entire mirror surface under test is referred to that of the central part. On-machine experiments showed that the interferometer would be applicable to the in-process measurement for a diamond turning in about 0.06 micrometers p-p accuracy.

© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Tsuguo Kohno ; Daishi Matsumoto ; Takanori Yazawa and Yutaka Uda
"Radial shearing interferometer for in-process measurement of diamond turning", Proc. SPIE 3173, Ultrahigh- and High-Speed Photography and Image-based Motion Measurement, 280 (December 12, 1997); doi:10.1117/12.294519; http://dx.doi.org/10.1117/12.294519


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