Micromachining of metals and ceramics by nano- and picosecond laser radiation

Juergen Jandeleit; Alexander Horn; Ernst-Wolfgang Kreutz; Reinhart Poprawe

doi:10.1117/12.284498

5 September 1997 Micromachining of metals and ceramics by nano- and picosecond laser radiation

Juergen Jandeleit, Alexander Horn, Ernst-Wolfgang Kreutz, Reinhart Poprawe

Proceedings Volume 3223, Micromachining and Microfabrication Process Technology III; (1997) https://doi.org/10.1117/12.284498
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

The removal processes of Si₃N₄- and SiC-ceramics and tungstencarbide were investigated using 40 ps and 10 ns laser pulses. The threshold fluence for removal and the removal rate per pulse were determined. Changes in the chemical composition of the processed surfaces are described and the influence of the removal strategy on the processing results are discussed. Micro-structures were produced in combination with high- resolution optics and precision motion control systems. In SiC-ceramics grooves were produced with geometries smaller than 30 micrometer. In Si₃N₄-ceramics holes were drilled with diameters smaller than 6 micrometer. The influence of scanning velocity, overlap of the laser pulses and pulse energy on material removal and surface finish were discussed.

Citation Download Citation

Juergen Jandeleit, Alexander Horn, Ernst-Wolfgang Kreutz, and Reinhart Poprawe "Micromachining of metals and ceramics by nano- and picosecond laser radiation", Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); https://doi.org/10.1117/12.284498

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