MEMS metrology station based on two interferometers

Adolfo O. Gutierrez; Daniel M. Edmans; Gernot Seidler; Michelle D. Simkulet; Steven C. Aceto; Eric Westervelt; Michael Burrage; Chris Cormeau

doi:10.1117/12.284551

2 September 1997 MEMS metrology station based on two interferometers

Adolfo O. Gutierrez, Daniel M. Edmans, Gernot Seidler, Michelle D. Simkulet, Steven C. Aceto, Eric Westervelt, Michael Burrage, Chris Cormeau

Author Affiliations +

Proceedings Volume 3225, Microlithography and Metrology in Micromachining III; (1997) https://doi.org/10.1117/12.284551
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

An optical metrology station has been developed for measuring static and dynamic displacements of a forced balance vibration micromachined sensor. The station uses tow fiber optic Fabry-Perot interferometers along with homodyne demodulation for generating real time displacement measurements having nanometer range resolution. The MEMS electro-optical interferometry test station is fully automated through the use of motorized x-y-z linear stages for fiber positioning and through the use of a PC running a LabView software user interface for data acquisition control and signal demodulation. The station has been given extensive graphic capabilities for simplified operation and data interpretation. Although the MEMS optical interferometry test station has been implemented to assist in the characterization of InterScience's wideband accelerometers, the concept of homodyne demodulation can be easily extended for performing metrology in a wide variety of MEMS structures for both, static and dynamic analyses. In this paper we report the design and construction. We also discus its potential for complete automation and the intended operation of the system in a pressure controlled environment. The operation of the system under rough or better vacuum conditions has been considered in the presented design through the use of vacuum compatible components. It is anticipated that vacuum operation will be incorporated in future upgrades of the present station since viscous damping is a factor of critical importance in microscopic vibrating structures.

Citation Download Citation

Adolfo O. Gutierrez, Daniel M. Edmans, Gernot Seidler, Michelle D. Simkulet, Steven C. Aceto, Eric Westervelt, Michael Burrage, and Chris Cormeau "MEMS metrology station based on two interferometers", Proc. SPIE 3225, Microlithography and Metrology in Micromachining III, (2 September 1997); https://doi.org/10.1117/12.284551

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