Paper
20 April 1998 Mapping and inspection of damage and artifacts in large-scale optics
Frank Rainer
Author Affiliations +
Abstract
We have developed tools and procedures for accurately and economically mapping and inspecting damage and artifacts in the bulk as well as on the surfaces of meter-sized optics intended for use on large-scale lasers such as Beamlet and NIF. Optics are illuminated by white light through the optic edge or externally at grazing incidence using linear fiber-optic arrays. From these coordinates, artifacts are located and digitally recorded with resolutions of less than 5 micrometers using a long-working-distance microscope. Total internal reflection of edge illumination efficiently couples light into the entire optic to inspect for bulk artifacts such as bubbles, inclusions, edge-cladding flaws and laser-induced damage as well as surface scratches and pits which propagate into the substrate. Surface contamination such as dust, fingerprints, coating flaws and cleaning flaws are highlighted by external grazing illumination. The procedures permit accurate recording of the evolution of damage after many laser shots as well as correlation of damage from one optic to the next in a laser chain.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Frank Rainer "Mapping and inspection of damage and artifacts in large-scale optics", Proc. SPIE 3244, Laser-Induced Damage in Optical Materials: 1997, (20 April 1998); https://doi.org/10.1117/12.307019
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CITATIONS
Cited by 10 scholarly publications.
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KEYWORDS
Inspection

Optical inspection

Laser induced damage

Digital recording

Fiber optics

Grazing incidence

Laser development

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